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Micro- and Nanotechnologies www.tu-ilmenau.de/en/imn The Inter-departmental Institute of Micro- and Nanotechnologies (IMN MacroNano®) is where 39 groups and junior research units from various departments of the Technische Universität Ilmenau are conducting joint research into the fundamentals, new technologies, and applications of micro- and nanosystems for the fields of life sciences, photonics, and energy efficiency. At the federally funded core facility “Micro-Nano Integration“, external partners from science and industry can make use of the outstanding technological infrastructure and the special equipment. Key research areas »» Micro- and nanoelectronics, -sensorics and -diagnostics »» Micro- and nano-system integration »» Intelligent materials and surface modification »» Fluidic systems and bio-microsystems engineering »» Micro-opto-electro-mechanical systems »» Nanomeasuring and nanopositioning technology p. 51, D1 +49 3677 69-3400 macronano@tu-ilmenau.de Feynmanbau Gustav-Kirchhoff-Str. 7 98693 Ilmenau DEPARTMENTS 45


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