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Center of Micro- and Nanotechnologies www.tu-ilmenau.de/en/imn The Center of Micro- and Nanotechnologies is the technology platform for both basic and applied research in the field of micro and nanosystems. The device and plant infrastructure allows a variety of coating and structuring processes of micro- and nanotechnology applied for processing polymers, semi-conductor materials, glasses and ceramics. Powerful analysis apparatus permitting analyses down to the atomic scale complement the scientific equipment. In the two buildings belonging to the center, there are 800 m² of laboratory surface and 1200 m² of cleanroom surface of classes 5, 6 and 7 at the scientists’ disposal. The modern technological infrastructure is not only utilized by the Institute of Micro- and Nanotechnologies of the TU Ilmenau (IMN MacroNano®). The Center of Micro- and Nanotechnologies being the „core facility of the German Research Foundation (DFG)“, it makes these instruments and devices available to external users from research and industry, too. All offers made by the center to companies are described in a comprehensive compendium of expertise (www.tu-ilmenau.de/en/institute-of-micro and-nanotechnologies). p. 51, D1 +49 3677 69-3400 macronano@tu-ilmenau.de Feynmanbau Gustav-Kirchhoff-Str. 7 98693 Ilmenau 27 RESEARCH


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